■ High Voltage Scanning Transmission Electron Microscope Name of Device Basic Features Purpose of Device Reaction Science high-voltage scanning transmission electron microscope Max voltage acceleration: 1000 kV Point resolution：0.15nm CTEM / STEM Thick sample observation High Voltage Scanning Transmission Electron Microscope Max voltage acceleration: 1250 kV Resolution: ＜0.14 nm ■ Electron Microscope Cluster Name of Device Basic Features Purpose of Device 3D Electron Microscope Max voltage acceleration: 300 kV Resolution: 0.236 nm 3D tomograpgy （Sample angle: ±70°） Observation and analysis in liquid temperature and helium temperature. High Resolution Electron Microscope Max voltage acceleration: 200kV Resolution: 0.23nm Conventional observations Field emission observations Electric transport experiments Electron Spectroscopic Microscope Max voltage acceleration: 200 kV Resolution: 0.23 nm High level analysis of EELS, spectrum imaging, etc. Energy resolution: 0.7-1.2eV, max 0.4ev (when using deconvolution software) Analysis Electron Microscope Max voltage acceleration: 300 kV Resolution: 0.18 nm Analysis（GIF） High temperature observation, low temperature observation, atmospheric obeservation High Resolution Electron Microscope Max voltage acceleration: 200 kV Resolution: 0.19 nm Light-field images Dark-field images High resolution images Biological Electron Microscope Max voltage acceleration: 120 kV Resolution: 0.28 nm Aberration Corrected Electron Microscope Max voltage acceleration: 200 kV Resolution: 0.09 nm Electron Microscope Max voltage acceleration: 30 kV Resolution: 2-3.5 nm Elemental analysis by EDX Field Emission Electron Microscope Max voltage acceleration: 200 kV Resolution: 0.23 nm Cathode ray holograpgy 200kV General Purpose Electron Microscope Max voltage acceleration: 200 kV Resolution: ＜ 0.204 nm Analysis（EDS） ■ Sample Preparation Devices Name of Device Basic Features Purpose of Device Focused Ion Beam Sample Preparation Acclerating voltage　10〜40kV Magnification　150〜300,000/60〜300,000（SIM Image） Low Accelerating Ion Milling Gentle Mill Model IV5 Voltage acceleration: 0.1〜2kV Sample angle: 0〜45° Removal of damaged layer Fine Ion Milling GATAN PIPS Model 691 Voltage acceleration: 100V〜6.0kV NTT-AT / Petit Polisher Load / rotation speed: Constant Particle size: 20、3、>1 μm Flat surface polishing Meiwa / Carbon Coater CADE-E Uses high purity carbon fiber Coding time: 1.95 sec. Plasma ESD: 15 sec. Carbon coat Increase hydrophilicity Copyright © 2009 Nagoya University Ecotopia Science Institute